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90 nm · Planar bulk, SiON

LM90PB-R

90 nm planar bulk, radiation hardened by design

Status

Technology description (including the radiation design rules) and device models complete; hardened cells in progress.

The family at the same scale: LM90PB-R's planar transistor
The family at the same scale: LM90PB-R's planar transistor

LM90PB-R is a 90 nm-class kit for space and high-reliability electronics. Its transistors and wiring are those of an ordinary 90 nm bulk process; the hardening is in the cell library. Every flip-flop and latch is a radiation-tolerant DICE cell, every cell carries its own well and substrate contacts and guard rings against latch-up, and the cells are 12 tracks tall to make room for them. The kit covers −55 to 125 °C.

Why 90 nm, and why hardened by design

Satellites, launchers and high-energy physics experiments need chips that survive radiation. Dedicated radiation-hardened processes are rare and generations behind, so most modern space ASICs are built on commercial processes and hardened by design. 90 nm is a widely used generation for this: its thin gate oxides already tolerate a high total ionizing dose, published 90 nm hardened-by-design processors have reached 1 Mrad, and the remaining risk, single particles flipping a stored bit or causing a glitch, is handled in the cells.

Technology at a glance

Supply1.2 V core (1.08–1.32 V corners), 2.5 V I/O
Temperature range−55 to 125 °C
Contacted gate pitch260 nm
Gate length37 nm (LVT), 53 nm (SVT), 65 nm (HVT)
Gate oxide1.2–2.1 nm by flavour; 5 nm for the 2.5 V devices
Metal stack7 copper layers, 220 nm first-metal pitch, carbon-doped oxide (k 2.9)
Cell height12 tracks (2.64 µm)
Threshold voltagesHVT, SVT, LVT
Device modelBSIM4

Transistors

DeviceLeakage (nA/µm)Drive (µA/µm)
nMOS HVT / SVT / LVT0.01 / 3 / 50440 / 530 (at 0.9 V) / 1110
pMOS HVT / SVT / LVT0.01 / 3 / 50220 / 265 / 555

Radiation hardening in the cells

EffectWhat it doesHow the kit handles it
Total ionizing doseSlowly shifts transistors and opens leakage paths at isolation edgesThin-oxide devices; minimum transistor widths and guard rings in place of special transistor shapes
Single-event latch-upA particle triggers a parasitic thyristor that shorts the supplyN+/P+ guard rings and a tap in every cell; published data shows no latch-up up to a particle LET of 60 MeV·cm²/mg with guard rings
Single-event upsetA particle flips a stored bitDICE flip-flops and latches: each bit is held on four nodes, so one strike cannot flip it
Single-event transientA particle causes a short glitch in logicPulse widths characterized per cell, for filtering and timing margins

Hardening has a price. Published 90 nm results put a DICE flip-flop at about twice the area and power of a standard one and 1.5 times its delay; triple modular redundancy costs four times the area and power. Our kit will measure these costs on its own cells.

The stack to scale
The stack to scale
Resistance and capacitance per metal layer
Resistance and capacitance per metal layer

The kit's analysis will measure the critical charge of every storage cell, standard and DICE, and the glitch width of every logic cell, by injecting the current pulse of a particle strike at each sensitive node. This gives designers upset sensitivity per cell next to the usual timing and power.

Built from

The 2003 international roadmap (devices and interconnect), a published 90 nm logic process (gate pitch and the full metal stack), and published radiation results for hardened-by-design chips on commercial 90 nm and 65 nm processes.

Next

The hardened 12-track libraries (DICE sequential cells, guard rings and taps in every cell) and the single-event analysis.

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